型 号（Model）: MUE-ECO

生产商（Manufacturer): 日本ULVAC公司(ULVAC Technologies, Inc., Japan)

用 途（Applicatio）:
纳米量级的金属薄膜及部分介质薄膜的制备。
Preparation of metallic and some dielectric films in thickness of nanometers.

主要参数（Main Parameters):
本底真空(Ultimate Pressure): 5×10-6 Pa
衬底加热温度(Substrate Temperature): RT~350℃
厚度不均匀度(Nonuniformity of Film Thickness): ≤±5% (Φ80mm, Al)

负 责 人（Person in Charge:
诸葛飞, ( Dr. Fei ZHUGE), Tel：86685019
刘宜伟，（Mr. Yiwei LIU）Tel：86685030